Development of Fine Motion Stages for Six Degree-of-Freedom Submicron Positioning
Submicron positioning stages are an invaluable tool in a variety of high precision applications including microscopy, optics, micromachining, and photolithography. This thesis covers the development and testing of a mechanical fine motion stage that uses a novel configuration of precision ballscrews...
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| Format: | Thesis |
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Massachusetts Institute of Technology
2022
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| Online Access: | https://hdl.handle.net/1721.1/139949 |