Six-Axis Levitated Stage with a Novel Flux-Steering Magnetic Hub Actuator
This thesis presents a two-axis, permanent-magnet-biased, flux-steering actuator and its integration into a levitated stage. The hub actuator consists of a steel stator ring (165 mm OD) and a steel mover cylinder (52 mm OD). The stator has four teeth evenly spaced and pointing radially inward, each...
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| Format: | Thesis |
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Massachusetts Institute of Technology
2022
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| Online Access: | https://hdl.handle.net/1721.1/140106 |