Conformal Coating of Freestanding Particles by Vapor-Phase Infiltration
© 2020 The Authors. Advanced Materials Interfaces published by Wiley-VCH GmbH A novel atomic layer method for encapsulating individual micro- and nano-particles with thin (sub-10-nm) dielectric films is presented. This method leverages the diffusion of vapor-phase precursors through an underlying in...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022
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| Online Access: | https://hdl.handle.net/1721.1/141217 |