Conformal Coating of Freestanding Particles by Vapor-Phase Infiltration

Conformal Coating of Freestanding Particles by Vapor-Phase Infiltration

© 2020 The Authors. Advanced Materials Interfaces published by Wiley-VCH GmbH A novel atomic layer method for encapsulating individual micro- and nano-particles with thin (sub-10-nm) dielectric films is presented. This method leverages the diffusion of vapor-phase precursors through an underlying in...

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Bibliographic Details
Main Authors:	Liapis, AC, Subramanian, A, Cho, S, Kisslinger, K, Nam, CY, Yun, SH
Format:	Article
Language:	English
Published:	Wiley 2022
Online Access:	https://hdl.handle.net/1721.1/141217

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