Resolving Triblock Terpolymer Morphologies by Vapor-Phase Infiltration

Resolving Triblock Terpolymer Morphologies by Vapor-Phase Infiltration

© 2020 American Chemical Society. The spontaneous formation of well-organized three-dimensional (3D) nanostructures from self-assembled block copolymers (BCPs) holds promise for nanofabrication and lithography. The addition of a third block to BCPs provides access to a plethora of 3D geometries, but...

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Bibliographic Details
Main Authors: Lee, Sangho, Subramanian, Ashwanth, Tiwale, Nikhil, Kisslinger, Kim, Mumtaz, Muhammad, Shi, Ling-Ying, Aissou, Karim, Nam, Chang-Yong, Ross, Caroline A
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering
Format: Article
Language:English
Published: American Chemical Society (ACS) 2022
Online Access:https://hdl.handle.net/1721.1/142589

Internet

https://hdl.handle.net/1721.1/142589

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