Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample

Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample

The use of electron mirrors in aberration correction and surface-sensitive microscopy techniques such as low-energy electron microscopy has been established. However, in this work, by implementing an easy to construct, fully electrostatic electron mirror system under a sample in a conventional scann...

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Bibliographic Details
Main Authors: Abedzadeh, Navid, Krielaart, MAR, Kim, Chung-Soo, Simonaitis, John, Hobbs, Richard, Kruit, Pieter, Berggren, Karl K
Other Authors: Massachusetts Institute of Technology. Research Laboratory of Electronics
Format: Article
Language:English
Published: Elsevier BV 2022
Online Access:https://hdl.handle.net/1721.1/142775

Internet

https://hdl.handle.net/1721.1/142775

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