Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample
The use of electron mirrors in aberration correction and surface-sensitive microscopy techniques such as low-energy electron microscopy has been established. However, in this work, by implementing an easy to construct, fully electrostatic electron mirror system under a sample in a conventional scann...
| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Elsevier BV
2022
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| Online Access: | https://hdl.handle.net/1721.1/142775 |
| _version_ | 1826213570546761728 |
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| author | Abedzadeh, Navid Krielaart, MAR Kim, Chung-Soo Simonaitis, John Hobbs, Richard Kruit, Pieter Berggren, Karl K |
| author2 | Massachusetts Institute of Technology. Research Laboratory of Electronics |
| author_facet | Massachusetts Institute of Technology. Research Laboratory of Electronics Abedzadeh, Navid Krielaart, MAR Kim, Chung-Soo Simonaitis, John Hobbs, Richard Kruit, Pieter Berggren, Karl K |
| author_sort | Abedzadeh, Navid |
| collection | MIT |
| description | The use of electron mirrors in aberration correction and surface-sensitive microscopy techniques such as low-energy electron microscopy has been established. However, in this work, by implementing an easy to construct, fully electrostatic electron mirror system under a sample in a conventional scanning electron microscope (SEM), we present a new imaging scheme which allows us to form scanned images of the top and bottom surfaces of the sample simultaneously. We believe that this imaging scheme could be of great value to the field of in-situ SEM which has been limited to observation of dynamic changes such as crack propagation and other surface phenomena on one side of samples at a time. We analyze the image properties when using a flat versus a concave electron mirror system and discuss two different regimes of operation. In addition to in-situ SEM, we foresee that our imaging scheme could open up avenues towards spherical aberration correction by the use of electron mirrors in SEMs without the need for complex beam separators. |
| first_indexed | 2024-09-23T15:51:21Z |
| format | Article |
| id | mit-1721.1/142775 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T15:51:21Z |
| publishDate | 2022 |
| publisher | Elsevier BV |
| record_format | dspace |
| spelling | mit-1721.1/1427752023-07-02T04:04:40Z Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample Abedzadeh, Navid Krielaart, MAR Kim, Chung-Soo Simonaitis, John Hobbs, Richard Kruit, Pieter Berggren, Karl K Massachusetts Institute of Technology. Research Laboratory of Electronics The use of electron mirrors in aberration correction and surface-sensitive microscopy techniques such as low-energy electron microscopy has been established. However, in this work, by implementing an easy to construct, fully electrostatic electron mirror system under a sample in a conventional scanning electron microscope (SEM), we present a new imaging scheme which allows us to form scanned images of the top and bottom surfaces of the sample simultaneously. We believe that this imaging scheme could be of great value to the field of in-situ SEM which has been limited to observation of dynamic changes such as crack propagation and other surface phenomena on one side of samples at a time. We analyze the image properties when using a flat versus a concave electron mirror system and discuss two different regimes of operation. In addition to in-situ SEM, we foresee that our imaging scheme could open up avenues towards spherical aberration correction by the use of electron mirrors in SEMs without the need for complex beam separators. 2022-05-26T17:46:15Z 2022-05-26T17:46:15Z 2021 2022-05-26T14:29:13Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/142775 Abedzadeh, Navid, Krielaart, MAR, Kim, Chung-Soo, Simonaitis, John, Hobbs, Richard et al. 2021. "Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample." Ultramicroscopy, 226. en 10.1016/J.ULTRAMIC.2021.113304 Ultramicroscopy Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International Licens http://creativecommons.org/licenses/by-nc-nd/4.0/ application/pdf Elsevier BV Other Repository |
| spellingShingle | Abedzadeh, Navid Krielaart, MAR Kim, Chung-Soo Simonaitis, John Hobbs, Richard Kruit, Pieter Berggren, Karl K Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample |
| title | Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample |
| title_full | Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample |
| title_fullStr | Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample |
| title_full_unstemmed | Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample |
| title_short | Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample |
| title_sort | electrostatic electron mirror in sem for simultaneous imaging of top and bottom surfaces of a sample |
| url | https://hdl.handle.net/1721.1/142775 |
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