Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM

Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM

Scanning electron microscopy is a powerful tool for nanoscale imaging of organic and inorganic materials. An important metric for characterizing the limits of performance of these microscopes is the Detective Quantum Efficiency (DQE), which measures the fraction of emitted secondary electrons (SEs)...

Full description

Bibliographic Details
Main Authors: Agarwal, Akshay, Simonaitis, John, Berggren, Karl K
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:English
Published: Elsevier BV 2022
Online Access:https://hdl.handle.net/1721.1/142777

Internet

https://hdl.handle.net/1721.1/142777

Similar Items