Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM
Scanning electron microscopy is a powerful tool for nanoscale imaging of organic and inorganic materials. An important metric for characterizing the limits of performance of these microscopes is the Detective Quantum Efficiency (DQE), which measures the fraction of emitted secondary electrons (SEs)...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
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Elsevier BV
2022
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| Online Access: | https://hdl.handle.net/1721.1/142777 |
| _version_ | 1826190466317549568 |
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| author | Agarwal, Akshay Simonaitis, John Berggren, Karl K |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Agarwal, Akshay Simonaitis, John Berggren, Karl K |
| author_sort | Agarwal, Akshay |
| collection | MIT |
| description | Scanning electron microscopy is a powerful tool for nanoscale imaging of organic and inorganic materials. An important metric for characterizing the limits of performance of these microscopes is the Detective Quantum Efficiency (DQE), which measures the fraction of emitted secondary electrons (SEs) that are detected by the SE detector. However, common techniques for measuring DQE approximate the SE emission process to be Poisson distributed, which can lead to incorrect DQE values. In this paper, we introduce a technique for measuring DQE in which we directly count the mean number of secondary electrons detected from a sample using image histograms. This technique does not assume Poisson distribution of SEs and makes it possible to accurately measure DQE for a wider range of imaging conditions. As a demonstration of our technique, we map the variation of DQE as a function of working distance in the microscope. |
| first_indexed | 2024-09-23T08:40:22Z |
| format | Article |
| id | mit-1721.1/142777 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T08:40:22Z |
| publishDate | 2022 |
| publisher | Elsevier BV |
| record_format | dspace |
| spelling | mit-1721.1/1427772023-07-03T06:02:39Z Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM Agarwal, Akshay Simonaitis, John Berggren, Karl K Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Scanning electron microscopy is a powerful tool for nanoscale imaging of organic and inorganic materials. An important metric for characterizing the limits of performance of these microscopes is the Detective Quantum Efficiency (DQE), which measures the fraction of emitted secondary electrons (SEs) that are detected by the SE detector. However, common techniques for measuring DQE approximate the SE emission process to be Poisson distributed, which can lead to incorrect DQE values. In this paper, we introduce a technique for measuring DQE in which we directly count the mean number of secondary electrons detected from a sample using image histograms. This technique does not assume Poisson distribution of SEs and makes it possible to accurately measure DQE for a wider range of imaging conditions. As a demonstration of our technique, we map the variation of DQE as a function of working distance in the microscope. 2022-05-26T17:59:33Z 2022-05-26T17:59:33Z 2021 2022-05-26T17:53:12Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/142777 Agarwal, Akshay, Simonaitis, John and Berggren, Karl K. 2021. "Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM." Ultramicroscopy, 224. en 10.1016/J.ULTRAMIC.2021.113238 Ultramicroscopy Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International Licens http://creativecommons.org/licenses/by-nc-nd/4.0/ application/pdf Elsevier BV arXiv |
| spellingShingle | Agarwal, Akshay Simonaitis, John Berggren, Karl K Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM |
| title | Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM |
| title_full | Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM |
| title_fullStr | Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM |
| title_full_unstemmed | Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM |
| title_short | Image-histogram-based secondary electron counting to evaluate detective quantum efficiency in SEM |
| title_sort | image histogram based secondary electron counting to evaluate detective quantum efficiency in sem |
| url | https://hdl.handle.net/1721.1/142777 |
| work_keys_str_mv | AT agarwalakshay imagehistogrambasedsecondaryelectroncountingtoevaluatedetectivequantumefficiencyinsem AT simonaitisjohn imagehistogrambasedsecondaryelectroncountingtoevaluatedetectivequantumefficiencyinsem AT berggrenkarlk imagehistogrambasedsecondaryelectroncountingtoevaluatedetectivequantumefficiencyinsem |