Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors

Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors

© 2021 IOP Publishing Ltd. We present a comprehensive study of molybdenum nitride (MoN) thin film deposition using direct current reactive magnetron sputtering. We have investigated the effect of various deposition conditions on the superconducting and electrical properties of the films. Furthermore...

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Bibliographic Details
Main Authors: Hallett, Lily, Charaev, Ilya, Agarwal, Akshay, Dane, Andrew, Colangelo, Marco, Zhu, Di, Berggren, Karl K
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:English
Published: IOP Publishing 2022
Online Access:https://hdl.handle.net/1721.1/142785

Internet

https://hdl.handle.net/1721.1/142785

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