Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors
© 2021 IOP Publishing Ltd. We present a comprehensive study of molybdenum nitride (MoN) thin film deposition using direct current reactive magnetron sputtering. We have investigated the effect of various deposition conditions on the superconducting and electrical properties of the films. Furthermore...
| Main Authors: | , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2022
|
| Online Access: | https://hdl.handle.net/1721.1/142785 |
| _version_ | 1811076523849940992 |
|---|---|
| author | Hallett, Lily Charaev, Ilya Agarwal, Akshay Dane, Andrew Colangelo, Marco Zhu, Di Berggren, Karl K |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Hallett, Lily Charaev, Ilya Agarwal, Akshay Dane, Andrew Colangelo, Marco Zhu, Di Berggren, Karl K |
| author_sort | Hallett, Lily |
| collection | MIT |
| description | © 2021 IOP Publishing Ltd. We present a comprehensive study of molybdenum nitride (MoN) thin film deposition using direct current reactive magnetron sputtering. We have investigated the effect of various deposition conditions on the superconducting and electrical properties of the films. Furthermore, we have shown that meander-shaped single-photon detectors made from 5 nm MoN films have saturated quantum detection efficiency at the telecom wavelength of 1550 nm. Our results indicate that MoN may be a material of interest for practical applications of low-temperature superconductors, including single-photon detectors and transition-edge sensors. |
| first_indexed | 2024-09-23T10:23:32Z |
| format | Article |
| id | mit-1721.1/142785 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T10:23:32Z |
| publishDate | 2022 |
| publisher | IOP Publishing |
| record_format | dspace |
| spelling | mit-1721.1/1427852023-02-09T19:27:33Z Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors Hallett, Lily Charaev, Ilya Agarwal, Akshay Dane, Andrew Colangelo, Marco Zhu, Di Berggren, Karl K Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science © 2021 IOP Publishing Ltd. We present a comprehensive study of molybdenum nitride (MoN) thin film deposition using direct current reactive magnetron sputtering. We have investigated the effect of various deposition conditions on the superconducting and electrical properties of the films. Furthermore, we have shown that meander-shaped single-photon detectors made from 5 nm MoN films have saturated quantum detection efficiency at the telecom wavelength of 1550 nm. Our results indicate that MoN may be a material of interest for practical applications of low-temperature superconductors, including single-photon detectors and transition-edge sensors. 2022-05-26T19:18:55Z 2022-05-26T19:18:55Z 2021 2022-05-26T19:08:29Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/142785 Hallett, Lily, Charaev, Ilya, Agarwal, Akshay, Dane, Andrew, Colangelo, Marco et al. 2021. "Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors." Superconductor Science and Technology, 34 (3). en 10.1088/1361-6668/ABDA5F Superconductor Science and Technology Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International https://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf IOP Publishing arXiv |
| spellingShingle | Hallett, Lily Charaev, Ilya Agarwal, Akshay Dane, Andrew Colangelo, Marco Zhu, Di Berggren, Karl K Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors |
| title | Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors |
| title_full | Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors |
| title_fullStr | Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors |
| title_full_unstemmed | Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors |
| title_short | Superconducting MoN thin films prepared by DC reactive magnetron sputtering for nanowire single-photon detectors |
| title_sort | superconducting mon thin films prepared by dc reactive magnetron sputtering for nanowire single photon detectors |
| url | https://hdl.handle.net/1721.1/142785 |
| work_keys_str_mv | AT hallettlily superconductingmonthinfilmspreparedbydcreactivemagnetronsputteringfornanowiresinglephotondetectors AT charaevilya superconductingmonthinfilmspreparedbydcreactivemagnetronsputteringfornanowiresinglephotondetectors AT agarwalakshay superconductingmonthinfilmspreparedbydcreactivemagnetronsputteringfornanowiresinglephotondetectors AT daneandrew superconductingmonthinfilmspreparedbydcreactivemagnetronsputteringfornanowiresinglephotondetectors AT colangelomarco superconductingmonthinfilmspreparedbydcreactivemagnetronsputteringfornanowiresinglephotondetectors AT zhudi superconductingmonthinfilmspreparedbydcreactivemagnetronsputteringfornanowiresinglephotondetectors AT berggrenkarlk superconductingmonthinfilmspreparedbydcreactivemagnetronsputteringfornanowiresinglephotondetectors |