Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles

Micro- and nanofabrication has revolutionized the world by enabling the explosion of ubiquitous electronic products and devices. However, the traditional lithography and deposition methods used in micro- and nanofabrication processes are planar in nature, with limited capacity for creating complex 3...

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Bibliographic Details
Main Author: Oran, Daniel
Other Authors: Boyden, Edward S.
Format: Thesis
Published: Massachusetts Institute of Technology 2022
Online Access:https://hdl.handle.net/1721.1/142819
https://orcid.org/0000-0003-3035-7548