Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles

Micro- and nanofabrication has revolutionized the world by enabling the explosion of ubiquitous electronic products and devices. However, the traditional lithography and deposition methods used in micro- and nanofabrication processes are planar in nature, with limited capacity for creating complex 3...

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Main Author: Oran, Daniel
Other Authors: Boyden, Edward S.
Format: Thesis
Published: Massachusetts Institute of Technology 2022
Online Access:https://hdl.handle.net/1721.1/142819
https://orcid.org/0000-0003-3035-7548
_version_ 1811094407638679552
author Oran, Daniel
author2 Boyden, Edward S.
author_facet Boyden, Edward S.
Oran, Daniel
author_sort Oran, Daniel
collection MIT
description Micro- and nanofabrication has revolutionized the world by enabling the explosion of ubiquitous electronic products and devices. However, the traditional lithography and deposition methods used in micro- and nanofabrication processes are planar in nature, with limited capacity for creating complex 3D structures. Techniques for 3D nanofabrication would ideally allow independent control over the geometry, feature size, and chemical composition of the final material. To address these needs, we invented a fundamentally new technology for nanofabrication called Implosion Fabrication (ImpFab). This technology was borne of three basic insights. First, that 2D nanofabrication is predicated on the planar deposition of functional materials; therefore, a truly 3D nanofabrication process might be enabled by a method for volumetric deposition of functional materials. Second, that by patterning inside a scaffold material, such as hydrogel, it is possible to not only create any geometry, but also pattern gradients and multiple different materials. Lastly, that a controllably shrinkable scaffold allows for the chemical assembly of materials in 3D patterns at one scale, which once shrunken, can increase the resolution and concentration of the patterned materials. This means the original patterning and deposition steps can be performed using machinery far less precise, and thus less expensive, than used for traditional 2D nanofabrication while eliminating the need to pattern sequential layers, vastly increasing the speed of 3D patterning while making layer-layer registration irrelevant. As a result, ImpFab expands the possibilities of nanofabrication in several fundamental ways that gives it the potential to create a revolution in fabrication much in the same way the planar process did for computation (Moore’s law) and microelectromechanical systems.
first_indexed 2024-09-23T15:59:35Z
format Thesis
id mit-1721.1/142819
institution Massachusetts Institute of Technology
last_indexed 2024-09-23T15:59:35Z
publishDate 2022
publisher Massachusetts Institute of Technology
record_format dspace
spelling mit-1721.1/1428192022-06-01T03:03:33Z Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles Oran, Daniel Boyden, Edward S. Program in Media Arts and Sciences (Massachusetts Institute of Technology) Micro- and nanofabrication has revolutionized the world by enabling the explosion of ubiquitous electronic products and devices. However, the traditional lithography and deposition methods used in micro- and nanofabrication processes are planar in nature, with limited capacity for creating complex 3D structures. Techniques for 3D nanofabrication would ideally allow independent control over the geometry, feature size, and chemical composition of the final material. To address these needs, we invented a fundamentally new technology for nanofabrication called Implosion Fabrication (ImpFab). This technology was borne of three basic insights. First, that 2D nanofabrication is predicated on the planar deposition of functional materials; therefore, a truly 3D nanofabrication process might be enabled by a method for volumetric deposition of functional materials. Second, that by patterning inside a scaffold material, such as hydrogel, it is possible to not only create any geometry, but also pattern gradients and multiple different materials. Lastly, that a controllably shrinkable scaffold allows for the chemical assembly of materials in 3D patterns at one scale, which once shrunken, can increase the resolution and concentration of the patterned materials. This means the original patterning and deposition steps can be performed using machinery far less precise, and thus less expensive, than used for traditional 2D nanofabrication while eliminating the need to pattern sequential layers, vastly increasing the speed of 3D patterning while making layer-layer registration irrelevant. As a result, ImpFab expands the possibilities of nanofabrication in several fundamental ways that gives it the potential to create a revolution in fabrication much in the same way the planar process did for computation (Moore’s law) and microelectromechanical systems. Ph.D. 2022-05-31T13:30:25Z 2022-05-31T13:30:25Z 2021-09 2022-05-25T15:55:34.422Z Thesis https://hdl.handle.net/1721.1/142819 https://orcid.org/0000-0003-3035-7548 In Copyright - Educational Use Permitted Copyright MIT http://rightsstatements.org/page/InC-EDU/1.0/ application/pdf Massachusetts Institute of Technology
spellingShingle Oran, Daniel
Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles
title Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles
title_full Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles
title_fullStr Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles
title_full_unstemmed Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles
title_short Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles
title_sort implosion fabrication rethinking 3d nanofabrication from first principles
url https://hdl.handle.net/1721.1/142819
https://orcid.org/0000-0003-3035-7548
work_keys_str_mv AT orandaniel implosionfabricationrethinking3dnanofabricationfromfirstprinciples