Implosion Fabrication: Rethinking 3D Nanofabrication from First Principles
Micro- and nanofabrication has revolutionized the world by enabling the explosion of ubiquitous electronic products and devices. However, the traditional lithography and deposition methods used in micro- and nanofabrication processes are planar in nature, with limited capacity for creating complex 3...
Main Author: | Oran, Daniel |
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Other Authors: | Boyden, Edward S. |
Format: | Thesis |
Published: |
Massachusetts Institute of Technology
2022
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Online Access: | https://hdl.handle.net/1721.1/142819 https://orcid.org/0000-0003-3035-7548 |
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