Self-consistent continuum modeling of radio-frequency glow discharges

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1990.

Bibliographic Details
Main Author: Gogolides, Evangelos
Other Authors: Herbert H. Sawin.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/14284