Self-consistent continuum modeling of radio-frequency glow discharges

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1990.

Bibliographic Details
Main Author: Gogolides, Evangelos
Other Authors: Herbert H. Sawin.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/14284
_version_ 1811078937891045376
author Gogolides, Evangelos
author2 Herbert H. Sawin.
author_facet Herbert H. Sawin.
Gogolides, Evangelos
author_sort Gogolides, Evangelos
collection MIT
description Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1990.
first_indexed 2024-09-23T11:07:36Z
format Thesis
id mit-1721.1/14284
institution Massachusetts Institute of Technology
language eng
last_indexed 2024-09-23T11:07:36Z
publishDate 2005
publisher Massachusetts Institute of Technology
record_format dspace
spelling mit-1721.1/142842019-04-12T13:48:28Z Self-consistent continuum modeling of radio-frequency glow discharges Gogolides, Evangelos Herbert H. Sawin. Massachusetts Institute of Technology. Dept. of Chemical Engineering. Massachusetts Institute of Technology. Dept. of Chemical Engineering. Chemical Engineering. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1990. Includes bibliographical references (leaves 274-287). by Evangelos Gogolides. Ph.D. 2005-08-10T18:09:53Z 2005-08-10T18:09:53Z 1990 1990 Thesis http://hdl.handle.net/1721.1/14284 22949810 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 2 v. (508 leaves) 25816368 bytes 25816127 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
spellingShingle Chemical Engineering.
Gogolides, Evangelos
Self-consistent continuum modeling of radio-frequency glow discharges
title Self-consistent continuum modeling of radio-frequency glow discharges
title_full Self-consistent continuum modeling of radio-frequency glow discharges
title_fullStr Self-consistent continuum modeling of radio-frequency glow discharges
title_full_unstemmed Self-consistent continuum modeling of radio-frequency glow discharges
title_short Self-consistent continuum modeling of radio-frequency glow discharges
title_sort self consistent continuum modeling of radio frequency glow discharges
topic Chemical Engineering.
url http://hdl.handle.net/1721.1/14284
work_keys_str_mv AT gogolidesevangelos selfconsistentcontinuummodelingofradiofrequencyglowdischarges