Self-consistent continuum modeling of radio-frequency glow discharges
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1990.
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Format: | Thesis |
Language: | eng |
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Massachusetts Institute of Technology
2005
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Online Access: | http://hdl.handle.net/1721.1/14284 |
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author | Gogolides, Evangelos |
author2 | Herbert H. Sawin. |
author_facet | Herbert H. Sawin. Gogolides, Evangelos |
author_sort | Gogolides, Evangelos |
collection | MIT |
description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1990. |
first_indexed | 2024-09-23T11:07:36Z |
format | Thesis |
id | mit-1721.1/14284 |
institution | Massachusetts Institute of Technology |
language | eng |
last_indexed | 2024-09-23T11:07:36Z |
publishDate | 2005 |
publisher | Massachusetts Institute of Technology |
record_format | dspace |
spelling | mit-1721.1/142842019-04-12T13:48:28Z Self-consistent continuum modeling of radio-frequency glow discharges Gogolides, Evangelos Herbert H. Sawin. Massachusetts Institute of Technology. Dept. of Chemical Engineering. Massachusetts Institute of Technology. Dept. of Chemical Engineering. Chemical Engineering. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1990. Includes bibliographical references (leaves 274-287). by Evangelos Gogolides. Ph.D. 2005-08-10T18:09:53Z 2005-08-10T18:09:53Z 1990 1990 Thesis http://hdl.handle.net/1721.1/14284 22949810 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 2 v. (508 leaves) 25816368 bytes 25816127 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
spellingShingle | Chemical Engineering. Gogolides, Evangelos Self-consistent continuum modeling of radio-frequency glow discharges |
title | Self-consistent continuum modeling of radio-frequency glow discharges |
title_full | Self-consistent continuum modeling of radio-frequency glow discharges |
title_fullStr | Self-consistent continuum modeling of radio-frequency glow discharges |
title_full_unstemmed | Self-consistent continuum modeling of radio-frequency glow discharges |
title_short | Self-consistent continuum modeling of radio-frequency glow discharges |
title_sort | self consistent continuum modeling of radio frequency glow discharges |
topic | Chemical Engineering. |
url | http://hdl.handle.net/1721.1/14284 |
work_keys_str_mv | AT gogolidesevangelos selfconsistentcontinuummodelingofradiofrequencyglowdischarges |