System Design, Noise Reduction, and Improved Dimension Reconstruction for High Performance Ellipsometry
The advancement in nano-manufacturing and many other industries calls for high-performance metrology and inspection methods. Nano-manufacturing has witnessed shrinking critical dimension and demonstrated mass production capability: the lithography process has reached 5nm node and could potentially r...
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| Format: | Thesis |
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Massachusetts Institute of Technology
2022
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| Online Access: | https://hdl.handle.net/1721.1/143138 |