System Design, Noise Reduction, and Improved Dimension Reconstruction for High Performance Ellipsometry

System Design, Noise Reduction, and Improved Dimension Reconstruction for High Performance Ellipsometry

The advancement in nano-manufacturing and many other industries calls for high-performance metrology and inspection methods. Nano-manufacturing has witnessed shrinking critical dimension and demonstrated mass production capability: the lithography process has reached 5nm node and could potentially r...

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Bibliografiske detaljer
Hovedforfatter:	Jiang, Bo
Andre forfattere:	Youcef-Toumi, Kamal
Format:	Thesis
Udgivet:	Massachusetts Institute of Technology 2022
Online adgang:	https://hdl.handle.net/1721.1/143138

Lignende værker

Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry
af: Jiang, Bo, et al.
Udgivet: (2022)

Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry
af: Jiang, Bo, et al.
Udgivet: (2022)

Ellipsometry/
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Udgivet: (1976)

NEUTRON ELLIPSOMETRY
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Udgivet: (1993)

Ellipsometry for industrial applications/
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Udgivet: (1988)

Ellipsometry and polarized light/
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Udgivet: (1977)

Modeling of dimensions and sensing properties of gold gratings by spectroscopic ellipsometry and finite element method
af: Mukherjee Deshabrato, et al.
Udgivet: (2024-01-01)

In-situ monitoring of tungsten oxides reduction during deuterium plasma exposure by spectroscopic ellipsometry
af: F. Pappalardo, et al.
Udgivet: (2024-12-01)

Ellipsometry of Functional Organic Surfaces and Films /
af: Hinrichs, Karsten, et al.
Udgivet: (2014)

Piloting epitaxy with ellipsometry as an in-situ sensor technology
af: Warnick, Sean C. (Sean Charles)
Udgivet: (2014)

Investigation of multilayer thin films using ellipsometry
af: Tikkiwal Vinay Anand.
Udgivet: (2013)

Investigation of multilayer thin films using ellipsometry
af: He, Lining.
Udgivet: (2009)

Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry
af: Petrik P., et al.
Udgivet: (2015-01-01)

Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry
af: Meng, Kai, et al.
Udgivet: (2021)

Deep Learning for Rapid Analysis of Spectroscopic Ellipsometry Data
af: Li, Yifei, et al.
Udgivet: (2022)

Ultrafast dynamic ellipsometry of laser driven shock waves
af: Bolme, Cynthia Anne
Udgivet: (2009)

Spectroscopic ellipsometry utilizing frequency division multiplexed lasers
af: Jongkyoon Park, et al.
Udgivet: (2024-12-01)

Optimizing diode laser performance: effective noise reduction in a three-dimension printing machine
af: Farhan, Mohammed F., et al.
Udgivet: (2024)

Optimizing Diode Laser Performance: Effective Noise Reduction in a Three-Dimension Printing Machine
af: Mohammed F. Farhan, et al.
Udgivet: (2024-11-01)

Spectroscopic imaging ellipsometry for thin film detection on uniaxial crystal
af: Guan, Lichao, et al.
Udgivet: (2019)

ELLIPSOMETRY, RAMAN SPECTROSCOPY AND SOI- NANOWIRE BIOSENSOR IN DIAGNOSIS OF COLORECTALCANCER
af: M. V. Kruchinina, et al.
Udgivet: (2017-09-01)

Ellipsometry studies on anodic aluminium oxide (AAO)growth mechanism on high purity aluminium plate
af: Lim, Leng Khoon
Udgivet: (2014)

Generic characterization method for nano-gratings using deep-neural-network-assisted ellipsometry
af: Jiang Zijie, et al.
Udgivet: (2024-01-01)

Noise reduction algorithms and performance metrics for improving speech reception in noise by cochlear-implant users
af: Goldsworthy, Raymond Lee, 1974-
Udgivet: (2008)

Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers
af: F. N. Dultsev, et al.
Udgivet: (2015-01-01)

Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range
af: Grundmann Jana, et al.
Udgivet: (2024-01-01)

Deterministic reflection contrast ellipsometry for thick multilayer two-dimensional heterostructures
af: Lee Kang Ryeol, et al.
Udgivet: (2024-02-01)

A Review of Measurement and Characterization of Film Layers of Perovskite Solar Cells by Spectroscopic Ellipsometry
af: Liyuan Ma, et al.
Udgivet: (2025-02-01)

Detection of alzheimer's disease biomarkers and my cot oxins using spectroscopic ellipsometry
af: Mustafa, Mohd Kamarulzaki
Udgivet: (2011)

Investigation of the optical and electrical properties of zinc oxide by terahertz time domain ellipsometry
af: Zixi Zhao, et al.
Udgivet: (2024-12-01)

Optical Characterisation of Doped Silicon Wafers Using THz Time-Domain Ellipsometry
af: Mazaheri Zahra, et al.
Udgivet: (2024-01-01)

Adaptive Noise Reduction System
af: Ivana Ropuš, et al.
Udgivet: (2013-01-01)

Scale Modeling of the Influence of Multiple Localized Defects of Metal Surface on Optical Ellipsometry Results
af: Oleksii Haluza, et al.
Udgivet: (2024-12-01)

Dual chiral structures in the cuticle of Protaetia mirifica analyzed with Mueller matrix spectroscopic ellipsometry
af: Arturo Mendoza-Galván, et al.
Udgivet: (2024-07-01)

Reduction of dimension for nonlinear dynamical systems
af: Van Gorder, R, et al.
Udgivet: (2016)

Design and fabrication of environmental noise reduction device
af: Qamaruddin, Mohd Fauzi
Udgivet: (2012)

Noise reduction techniques in electronic systems /
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Udgivet: (1988)

Noise reduction techniques in electronic systems /
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Udgivet: (1976)

Dimension Reduction Using Quantum Wavelet Transform on a High-Performance Reconfigurable Computer
af: Naveed Mahmud, et al.
Udgivet: (2019-01-01)

A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry
af: Liyuan Ma, et al.
Udgivet: (2025-01-01)