Applications of Probabilistic Machine Learning Models to Semiconductor Fabrication
Semiconductor fabrication relies heavily on the precision and accuracy of its individual processes in order to meet device requirements. If left unchecked, variations in these processes can lead to decreased performance and yield of the final product. While analysis and control of these variations h...
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Massachusetts Institute of Technology
2022
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| Online Access: | https://hdl.handle.net/1721.1/143184 |