Statistical Modeling of the Effects of Process Variations on Silicon Photonics
The rapidly growing field of silicon photonics is an attractive research and manufacturing platform, due to its ability to enable novel functionalities. Silicon photonics leverages existing CMOS processes and fabrication infrastructure, making its components suffer from the process variations presen...
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| Format: | Thesis |
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Massachusetts Institute of Technology
2022
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| Online Access: | https://hdl.handle.net/1721.1/143403 |