Scanning anode field emission microscopy of a single Si emitter

<jats:p> Emitter tip radius nonuniformity results in exponential variations in emission current and a relatively low array utilization. Here, we provide a method of mapping the current and field-factor from a single emitter over a small area using a scanning anode field emission microscope. A...

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Bibliographic Details
Main Authors: Rughoobur, Girish, Ilori, Olusoji O, Akinwande, Akintunde I
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:English
Published: American Vacuum Society 2022
Online Access:https://hdl.handle.net/1721.1/145498