Mitigation of Thermal Stability Concerns in FinFET Devices

Here, we developed a procedure for mitigating thermal hazards in packaged FinFET devices. A monitoring system was installed into devices, based on self-heating impact analysis in the system and device levels, to allow for the observation and alerting of chip temperature and reliability risks. A nove...

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Bibliographic Details
Main Authors: Bender, Emmanuel, Bernstein, Joseph B., Boning, Duane S.
Other Authors: Massachusetts Institute of Technology. Microsystems Technology Laboratories
Format: Article
Published: Multidisciplinary Digital Publishing Institute 2022
Online Access:https://hdl.handle.net/1721.1/145998