Disturbance Rejection Control for Active Vibration Suppression of Overhead Hoist Transport Vehicles in Semiconductor Fabs
In modern semiconductor fabrication plants, automated overhead hoist transport (OHT) vehicles transport wafers in front opening unified pods (FOUPs). Even in a cleanroom environment, small particles excited by the mechanical vibration of the FOUP can still damage the chips if such particles land on...
| Main Authors: | , , , |
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| Format: | Article |
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Multidisciplinary Digital Publishing Institute
2023
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| Online Access: | https://hdl.handle.net/1721.1/147606 |