On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 1992

Bibliographic Details
Main Author:	Vancauwenberghe, Olivier P. J.
Other Authors:	Massachusetts Institute of Technology. Department of Materials Science and Engineering
Format:	Thesis
Published:	Massachusetts Institute of Technology 2023
Subjects:	Materials Science and Engineering
Online Access:	https://hdl.handle.net/1721.1/147953

Internet

https://hdl.handle.net/1721.1/147953