On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 1992
| Yazar: | |
|---|---|
| Diğer Yazarlar: | |
| Materyal Türü: | Tez |
| Baskı/Yayın Bilgisi: |
Massachusetts Institute of Technology
2023
|
| Konular: | |
| Online Erişim: | https://hdl.handle.net/1721.1/147953 |
| _version_ | 1826215603887669248 |
|---|---|
| author | Vancauwenberghe, Olivier P. J. |
| author2 | Massachusetts Institute of Technology. Department of Materials Science and Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Materials Science and Engineering Vancauwenberghe, Olivier P. J. |
| author_sort | Vancauwenberghe, Olivier P. J. |
| collection | MIT |
| description | Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 1992 |
| first_indexed | 2024-09-23T16:36:32Z |
| format | Thesis |
| id | mit-1721.1/147953 |
| institution | Massachusetts Institute of Technology |
| last_indexed | 2024-09-23T16:36:32Z |
| publishDate | 2023 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/1479532023-02-08T03:02:19Z On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams Vancauwenberghe, Olivier P. J. Massachusetts Institute of Technology. Department of Materials Science and Engineering Materials Science and Engineering Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 1992 Vita. Includes bibliographical references (leaves 205-212). by Olivier P.J. Vancauwenberghe. Ph. D. Ph. D. Massachusetts Institute of Technology, Department of Materials Science and Engineering 2023-02-07T20:21:41Z 2023-02-07T20:21:41Z 1992 1992 Thesis https://hdl.handle.net/1721.1/147953 26408912 MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided. http://dspace.mit.edu/handle/1721.1/7582 213 leaves application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering Vancauwenberghe, Olivier P. J. On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams |
| title | On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams |
| title_full | On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams |
| title_fullStr | On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams |
| title_full_unstemmed | On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams |
| title_short | On the growth of semiconductor-based epitaxial and oxide films from low energy ion beams |
| title_sort | on the growth of semiconductor based epitaxial and oxide films from low energy ion beams |
| topic | Materials Science and Engineering |
| url | https://hdl.handle.net/1721.1/147953 |
| work_keys_str_mv | AT vancauwenbergheolivierpj onthegrowthofsemiconductorbasedepitaxialandoxidefilmsfromlowenergyionbeams |