Nonplanar Nanofabrication via Interface Engineering
This thesis develops a platform for scalable fabrication of suspended, ultrathin nanostructures as building blocks of nanoelectromechanical systems by extending conventional planar techniques to nonplanar designs. We achieve this by engineering interface forces through a patterned molecular monolaye...
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Massachusetts Institute of Technology
2023
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| Online Access: | https://hdl.handle.net/1721.1/150066 https://orcid.org/0000-0003-2877-1440 |