High aspect ratio diamond nanosecond laser machining

High aspect ratio diamond nanosecond laser machining

Abstract Laser processing of diamond has become an important technique for fabricating next generation microelectronic and quantum devices. However, the realization of low taper, high aspect ratio structures in diamond remains a challenge. We demonstrate the effects of pulse energy, p...

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Bibliographic Details
Main Authors: Golota, Natalie C., Preiss, David, Fredin, Zachary P., Patil, Prashant, Banks, Daniel P., Bahri, Salima, Griffin, Robert G., Gershenfeld, Neil
Other Authors: Massachusetts Institute of Technology. Department of Chemistry
Format: Article
Language:English
Published: Springer Berlin Heidelberg 2023
Online Access:https://hdl.handle.net/1721.1/150921

Internet

https://hdl.handle.net/1721.1/150921

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