Advanced Epitaxy on 2D Materials for Bottom-up Heterointegration with Low-defects and Membrane Production with High-throughput
Conventional epitaxy has significantly advanced the semiconductor industry, driving remarkable progress in various application fields such as electronics and optoelectronics. However, several limitations of epitaxial techniques have impeded the development of next-generation electronic and optoelect...
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| Format: | Thesis |
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Massachusetts Institute of Technology
2023
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| Online Access: | https://hdl.handle.net/1721.1/151868 |