Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants
Vibration suppression is critical in precision mechatronic systems for nanofabrication. In semiconductor plants, automated wafer handling is performed by Overhead Hoist Transport (OHT) vehicles that transport wafers in front opening unified pods (FOUPs). When the wafers are transported in FOUPs, sem...
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| Format: | Thesis |
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Massachusetts Institute of Technology
2023
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| Online Access: | https://hdl.handle.net/1721.1/152492 |