Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants

Active Vibration Suppression for Wafer Transfer Systems in Semiconductor Fabrication Plants

Vibration suppression is critical in precision mechatronic systems for nanofabrication. In semiconductor plants, automated wafer handling is performed by Overhead Hoist Transport (OHT) vehicles that transport wafers in front opening unified pods (FOUPs). When the wafers are transported in FOUPs, sem...

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Dettagli Bibliografici
Autore principale:	Qiu, Jiajie
Altri autori:	Youcef-Toumi, Kamal
Natura:	Tesi
Pubblicazione:	Massachusetts Institute of Technology 2023
Accesso online:	https://hdl.handle.net/1721.1/152492

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