Deep Transfer Learning for Macroscale Defect Detection in Semiconductor Manufacturing
This thesis proposes improvements to wafer macro inspection processes and tools on four axes at Texas Instruments. The major axis of improvement involves real-time machine learning recommendations regarding the presence of macroscale defects. In this work, a model for detecting central defects is de...
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| Format: | Thesis |
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Massachusetts Institute of Technology
2023
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| Online Access: | https://hdl.handle.net/1721.1/152881 |