Design and Control of Versatile High-Speed and Large-Range Atomic Force Microscopes

Microscopy instruments are important in nano-technology research for imaging of nanoscale phenomena. Among such tools is the atomic force microscope (AFM) for nanoscale imaging and surface characterization. An AFM scans a micro-cantilever over the sample surface to measure various quantities from th...

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Bibliographic Details
Main Author: Xia, Fangzhou
Other Authors: Youcef-Toumi, Kamal
Format: Thesis
Published: Massachusetts Institute of Technology 2023
Online Access:https://hdl.handle.net/1721.1/153043