The effect of low energy ion bombardment on the crystallographic orientation of thin films
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1985.
主要作者: | Yu, Lock See |
---|---|
其他作者: | L. Rafael Reif. |
格式: | Thesis |
语言: | eng |
出版: |
Massachusetts Institute of Technology
2005
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主题: | |
在线阅读: | http://hdl.handle.net/1721.1/15310 |
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