Controllable Transformation Matching Networks for Efficient RF Impedance Matching
Efficient and controlled delivery of radio-frequency (rf) power for semiconductor plasma processing typically relies upon tunable matching networks to transform the variable plasma load impedance to a fixed impedance suitable for most rf power amplifiers. Plasma applications require fast tuning spee...
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| Format: | Thesis |
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Massachusetts Institute of Technology
2024
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| Online Access: | https://hdl.handle.net/1721.1/153890 |