MEMS Simulations and Waveguide Loss Analysis forPhotonic Integrated Circuits
Microelectromechanical systems (MEMS) are promising candidates to be used in photonic integrated chips (PICs) for applications. While there are a variety of MEMS devices used for different purposes, the main concern of this thesis will be the using MEMS as phase shifters and understanding waveguide...
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| Format: | Thesis |
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Massachusetts Institute of Technology
2024
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| Online Access: | https://hdl.handle.net/1721.1/155390 |