Non-contact defect detection in silicon

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984.

Bibliographic Details
Main Author:	Olyha, Robert Stephen
Other Authors:	Mildred S. Dresselhaus.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/15576

Internet

http://hdl.handle.net/1721.1/15576