Non-contact defect detection in silicon
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984.
| Main Author: | |
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/15576 |
| _version_ | 1826193045119303680 |
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| author | Olyha, Robert Stephen |
| author2 | Mildred S. Dresselhaus. |
| author_facet | Mildred S. Dresselhaus. Olyha, Robert Stephen |
| author_sort | Olyha, Robert Stephen |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984. |
| first_indexed | 2024-09-23T09:32:55Z |
| format | Thesis |
| id | mit-1721.1/15576 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T09:32:55Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/155762019-04-12T16:05:31Z Non-contact defect detection in silicon Olyha, Robert Stephen Mildred S. Dresselhaus. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984. MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING. Bibliography: leaves 132-143. by Robert Stephen Olyha, Jr. M.S. 2005-08-05T18:27:22Z 2005-08-05T18:27:22Z 1984 1984 Thesis http://hdl.handle.net/1721.1/15576 11758639 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 143, [1] leaves 7326260 bytes 7326017 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Olyha, Robert Stephen Non-contact defect detection in silicon |
| title | Non-contact defect detection in silicon |
| title_full | Non-contact defect detection in silicon |
| title_fullStr | Non-contact defect detection in silicon |
| title_full_unstemmed | Non-contact defect detection in silicon |
| title_short | Non-contact defect detection in silicon |
| title_sort | non contact defect detection in silicon |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/15576 |
| work_keys_str_mv | AT olyharobertstephen noncontactdefectdetectioninsilicon |