Remote Epitaxy by In-Situ Grown BN and InGaN Strain Relaxation
Compound semiconductors have superior material properties over silicon, making them good candidates for optoelectronics and power electronics. As the need for electronics with higher flexibility and smaller size increases, lift-off methods for fabricating freestanding compound semiconductors are dev...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Published: |
Massachusetts Institute of Technology
2024
|
| Online Access: | https://hdl.handle.net/1721.1/155856 |