A heat flow problem in electron beam etching of thin films

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1959.

Bibliographic Details
Main Author:	Reed, Francis Keith
Other Authors:	Ewan W. Fletcher.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering
Online Access:	http://hdl.handle.net/1721.1/15821

Internet

http://hdl.handle.net/1721.1/15821