A heat flow problem in electron beam etching of thin films
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1959.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/15821 |
| _version_ | 1826211700118913024 |
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| author | Reed, Francis Keith |
| author2 | Ewan W. Fletcher. |
| author_facet | Ewan W. Fletcher. Reed, Francis Keith |
| author_sort | Reed, Francis Keith |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1959. |
| first_indexed | 2024-09-23T15:10:07Z |
| format | Thesis |
| id | mit-1721.1/15821 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T15:10:07Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/158212022-01-26T20:28:55Z A heat flow problem in electron beam etching of thin films Reed, Francis Keith Ewan W. Fletcher. Massachusetts Institute of Technology. Department of Electrical Engineering Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Electrical Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering, 1959. Includes bibliographical references (leaves 65-67). by Francis Keith Reed. M.S. 2005-08-04T17:23:01Z 2005-08-04T17:23:01Z 1959 Thesis http://hdl.handle.net/1721.1/15821 08060626 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 67 leaves 4117466 bytes 4117224 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering Reed, Francis Keith A heat flow problem in electron beam etching of thin films |
| title | A heat flow problem in electron beam etching of thin films |
| title_full | A heat flow problem in electron beam etching of thin films |
| title_fullStr | A heat flow problem in electron beam etching of thin films |
| title_full_unstemmed | A heat flow problem in electron beam etching of thin films |
| title_short | A heat flow problem in electron beam etching of thin films |
| title_sort | heat flow problem in electron beam etching of thin films |
| topic | Electrical Engineering |
| url | http://hdl.handle.net/1721.1/15821 |
| work_keys_str_mv | AT reedfranciskeith aheatflowprobleminelectronbeametchingofthinfilms AT reedfranciskeith heatflowprobleminelectronbeametchingofthinfilms |