Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.

Bibliographic Details
Main Author:	Finlayson, Mark Alan, 1977-
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/16793

Internet

http://hdl.handle.net/1721.1/16793