Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/16793 |
| _version_ | 1826189303213981696 |
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| author | Finlayson, Mark Alan, 1977- |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Finlayson, Mark Alan, 1977- |
| author_sort | Finlayson, Mark Alan, 1977- |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. |
| first_indexed | 2024-09-23T08:12:40Z |
| format | Thesis |
| id | mit-1721.1/16793 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T08:12:40Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/167932019-04-09T17:20:45Z Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography Finlayson, Mark Alan, 1977- Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. Includes bibliographical references (p. 59-61). This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. by Mark Alan Finlayson. S.M. 2005-05-19T14:36:52Z 2005-05-19T14:36:52Z 2001 2001 Thesis http://hdl.handle.net/1721.1/16793 50181446 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 61 p. 1649624 bytes 1649424 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Finlayson, Mark Alan, 1977- Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography |
| title | Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography |
| title_full | Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography |
| title_fullStr | Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography |
| title_full_unstemmed | Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography |
| title_short | Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography |
| title_sort | development of a scintillating reference grid for spatial phase locked electron beam lithography |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/16793 |
| work_keys_str_mv | AT finlaysonmarkalan1977 developmentofascintillatingreferencegridforspatialphaselockedelectronbeamlithography |