Development of X-ray lithography and nanofabrication techniques for III-V optical devices

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.

Bibliographic Details
Main Author:	Lim, Michael H. (Michael Hong)
Other Authors:	Hemry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/16801

Internet

http://hdl.handle.net/1721.1/16801