Development of X-ray lithography and nanofabrication techniques for III-V optical devices

Development of X-ray lithography and nanofabrication techniques for III-V optical devices

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.

Bibliographic Details
Main Author: Lim, Michael H. (Michael Hong)
Other Authors: Hemry I. Smith.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/16801

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