Axiomatic system design : chemical mechanical polishing machine case study

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Detalhes bibliográficos
Autor principal:	Melvin, Jason W. (Jason Webley)
Outros Autores:	Nam P. Suh.
Formato:	Tese
Idioma:	eng
Publicado em:	Massachusetts Institute of Technology 2005
Assuntos:	Mechanical Engineering.
Acesso em linha:	http://hdl.handle.net/1721.1/16957

Internet

http://hdl.handle.net/1721.1/16957