Axiomatic system design : chemical mechanical polishing machine case study

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Bibliographic Details
Main Author:	Melvin, Jason W. (Jason Webley)
Other Authors:	Nam P. Suh.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/16957

Internet

http://hdl.handle.net/1721.1/16957