Axiomatic system design : chemical mechanical polishing machine case study

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Detalhes bibliográficos
Autor principal: Melvin, Jason W. (Jason Webley)
Outros Autores: Nam P. Suh.
Formato: Tese
Idioma:eng
Publicado em: Massachusetts Institute of Technology 2005
Assuntos:
Acesso em linha:http://hdl.handle.net/1721.1/16957