Axiomatic system design : chemical mechanical polishing machine case study

Axiomatic system design : chemical mechanical polishing machine case study

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Bibliographic Details
Main Author: Melvin, Jason W. (Jason Webley)
Other Authors: Nam P. Suh.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/16957

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