Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Bibliographic Details
Main Author:	Konkola, Paul Thomas, 1973-
Other Authors:	Mark L. Schattenburg.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/16958

Internet

http://hdl.handle.net/1721.1/16958