Metrology of thin silicon expitaxial films : determination of epitaxial film thickness by Fourier-transform infra-red spectrometry

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.

Bibliographic Details
Main Author:	Cherkassky, Alexander (Alexander Peter), 1963-
Other Authors:	Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/17405

Internet

http://hdl.handle.net/1721.1/17405