Pulsed-plasma chemical vapor deposition of organosilicon thin films for dielectric applications

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2003.

Bibliographic Details
Main Author:	Burkey, Daniel D
Other Authors:	Karen K. Gleason.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/17947

Internet

http://hdl.handle.net/1721.1/17947