The development of a prototype Zone-Plate-Array Lithography (ZPAL) system

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.

Bibliographic Details
Main Author:	Patel, Amil Ashok, 1979-
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/18054

Internet

http://hdl.handle.net/1721.1/18054